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| PEGASUS™ A200

home Product Hardware (H/W) Probe Station Wentworth(프로브 스테이션) PEGASUS™ A200

| 개요

  • • 자동 프로브 스테이션 : 최대 200 mm 웨이퍼용

| 주요 기능

  • • Automatic wafer handling, pattern recognition and probing
  • • High throughput cassette to cassette automation
  • • Wafer pre-alignment and detection
  • • Handling capabilities for a variety of materials such as GaN, GaAs, saw frames and thin wafers
  • • Configurable to high voltages in excess of 5 kV for specialized applications
  • • Optional thermal chuck capability

| 응용 분야

  • • High volume, high throughput
  • • Special handling applications such as GaAs, GaN, saw frames and thin wafers