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| PEGASUS™ M200FA & M300FA

home Product Hardware (H/W) Probe Station Wentworth(프로브 스테이션) PEGASUS™ M200FA & M300FA

| 개요

  • • 매뉴얼 타입의 분석용 프로브 스테이션 : 200 mm 와 300 mm 웨이퍼용

| 주요 기능

  • • Pegasus™ M200FA supports full and partial wafers to 200 mm
  • • Pegasus™ M300FA supports full and partial wafers to 300 mm
  • • Robust, highly stable platform for reliable and repeatable sub-micron probing
  • • Temperature probing from -60 °C to +400 °C
  • • Front facing controls with fine and coarse adjustment
  • • Large area platen with height adjustment and gross lift
  • • Fine lift chuck mechanism

| 응용 분야

  • • Ideal for high power and ultra fast I.V./C.V. probing
  • • Failure analysis
  • • Design verification
  • • Thermal characterization
  • • Parametric testing (DC to low level)